Laser machining systems typically achieve system accuracy at the micrometer level.
Crossing this boundary presents a challenging combination of optimisation tasks that
require use of complex technological solutions. In this work, we focus on the research
of a laser station that reaches into the world of submicron precision. In this thesis,
an experimental laser machining station is designed and set up, using an air-bearing
positioning table offering sub-micron accuracy. The construction, optical system, illumination of the sample by Köhler illumination, laser focusing system, and an option
to further couple laser sources are described. During research workpiece was monitored with a high-speed camera, and motion of the sample was analysed using sub-pixel
phase cross-correlation method. The results were compared with the measurements of
the table encoder. In the scope of measurements a maximum deviation of the table of
0,4 µm is measured, and a minimum of 0,01 µm when lower accelerations are applied.
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