20.500.12556/RUL-148964 Postavitev in evaluacija laserske obdelovalne postaje s sistemsko natančnostjo pod mikrometrom Design and evaluation of a laser processing station with system precision below one micrometer Laserski obdelovalni sistemi dosegajo tipično sistemsko natančnost na nivoju mikrometra. Preseganje te meje prestavlja zahtevno reševanje kombinacije optimizacijskih nalog, ki zahtevajo uporabo kompleksnih tehnoloških rešitev. V delu se osredotočimo na raziskavo laserske postaje, ki posega v svet submikronske natančnosti. V nalogi je zasnovana in postavljena eksperimentalna laserska obdelovalna postaja, z uporabo pozicionirne mizice z zračnimi ležaji, ki ponuja sub-mikronske natančnosti. Opisana je konstrukcija, optični sistem, osvetlitev vzorca preko Köhlerjeve osvetlitve, način fokusiranja laserja, ter način nadaljnje sklopitve laserskih virov. Sliko obdelovanca smo spremljali s hitro kamero, ter izvedli analizo gibanja vzorca s sub-pikselsko metodo fazne križne korelacije, ter rezultate primerjali z meritvami enkoderja mizice. Mizica glede na obseg analize dosega največje izmerjene odstopke v velikosti 0,4 µm, ob uporabo manjših pospeškov pa 0,01 µm. Laser machining systems typically achieve system accuracy at the micrometer level. Crossing this boundary presents a challenging combination of optimisation tasks that require use of complex technological solutions. In this work, we focus on the research of a laser station that reaches into the world of submicron precision. In this thesis, an experimental laser machining station is designed and set up, using an air-bearing positioning table offering sub-micron accuracy. The construction, optical system, illumination of the sample by Köhler illumination, laser focusing system, and an option to further couple laser sources are described. During research workpiece was monitored with a high-speed camera, and motion of the sample was analysed using sub-pixel phase cross-correlation method. The results were compared with the measurements of the table encoder. In the scope of measurements a maximum deviation of the table of 0,4 µm is measured, and a minimum of 0,01 µm when lower accelerations are applied. laserji laserska litografija križna korelacija fazna korelacija zračni ležaji sistemske natančnosti laserske obdelave lasers laser lithography cross correlation phase correlation air bearings system precision laser machining true false false [J. Tuta] Slovenski jezik Angleški jezik Magistrsko delo/naloga 2023-09-02 08:31:05 2023-09-02 08:31:08 2023-10-10 14:05:37 0000-00-00 00:00:00 2023 0 Ljubljana 0 XX, 66 str. 0000-00-00 NiDoloceno NiDoloceno NiDoloceno 0000-00-00 0000-00-00 0000-00-00 621.9.048.7:621.375.826(043.2) 255620 167821571 29471.pdf 29471.pdf 1 BF767BD04E1B2D07A3E25B1D81D4D5B4 cb6a0b5213ce8722267a71499ac87dc94eb0a5e186bff6cdec7b75a04a14843a 4c81e62f-495a-11ee-af86-0050569b8976 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=173342 Fakulteta za strojništvo 0 0 0