Postavitev in evaluacija laserske obdelovalne postaje s sistemsko natančnostjo pod mikrometrom

Tuta, Janko (author), Petkovšek, Rok (mentor), Mur, Jaka (comentor)

Laserski obdelovalni sistemi dosegajo tipično sistemsko natančnost na nivoju mikrometra. Preseganje te meje prestavlja zahtevno reševanje kombinacije optimizacijskih nalog, ki zahtevajo uporabo kompleksnih tehnoloških rešitev. V delu se osredotočimo na raziskavo laserske postaje, ki posega v svet submikronske natančnosti. V nalogi je zasnovana in postavljena eksperimentalna laserska obdelovalna postaja, z uporabo pozicionirne mizice z zračnimi ležaji, ki ponuja sub-mikronske natančnosti. Opisana je konstrukcija, optični sistem, osvetlitev vzorca preko Köhlerjeve osvetlitve, način fokusiranja laserja, ter način nadaljnje sklopitve laserskih virov. Sliko obdelovanca smo spremljali s hitro kamero, ter izvedli analizo gibanja vzorca s sub-pikselsko metodo fazne križne korelacije, ter rezultate primerjali z meritvami enkoderja mizice. Mizica glede na obseg analize dosega največje izmerjene odstopke v velikosti 0,4 µm, ob uporabo manjših pospeškov pa 0,01 µm.

• Language: Slovenian
• Keywords: laserji, laserska litografija, križna korelacija, fazna korelacija, zračni ležaji, sistemske natančnosti, laserske obdelave
• Work type: Master's thesis/paper
• Typology: 2.09 - Master's Thesis
• Organization: FS - Faculty of Mechanical Engineering
• Place of publishing: Ljubljana
• Publisher: [J. Tuta]
• Year: 2023
• Number of pages: XX, 66 str.
• PID: 20.500.12556/RUL-148964
• UDC: 621.9.048.7:621.375.826(043.2)
• COBISS.SI-ID: 167821571
• Publication date in RUL: 02.09.2023

TUTA, Janko, 2023, Postavitev in evaluacija laserske obdelovalne postaje s sistemsko natančnostjo pod mikrometrom [online]. Master’s thesis. Ljubljana : J. Tuta] . [Accessed 5 April 2025]. Retrieved from: https://repozitorij.uni-lj.si/IzpisGradiva.php?lang=eng&id=148964

Secondary language

• Language: English
• Title: Design and evaluation of a laser processing station with system precision below one micrometer

Abstract

Laser machining systems typically achieve system accuracy at the micrometer level. Crossing this boundary presents a challenging combination of optimisation tasks that require use of complex technological solutions. In this work, we focus on the research of a laser station that reaches into the world of submicron precision. In this thesis, an experimental laser machining station is designed and set up, using an air-bearing positioning table offering sub-micron accuracy. The construction, optical system, illumination of the sample by Köhler illumination, laser focusing system, and an option to further couple laser sources are described. During research workpiece was monitored with a high-speed camera, and motion of the sample was analysed using sub-pixel phase cross-correlation method. The results were compared with the measurements of the table encoder. In the scope of measurements a maximum deviation of the table of 0,4 µm is measured, and a minimum of 0,01 µm when lower accelerations are applied.

• Keywords: lasers, laser lithography, cross correlation, phase correlation, air bearings, system precision, laser machining