A 3D LTCC-based ceramic microfluidic system with RF dielectric heating of liquids

Makarovič, Kostja (avtor), Belavič, Darko (avtor), Vidmar, Matjaž (avtor), Malič, Barbara (avtor)

The design, fabrication and functional evaluation of the radio-frequency dielectric heating of liquids in an LTCC-based ceramic microfluidic system are described and discussed. The device, which relies on the dielectric heating of liquids, was fabricated using a low temperature co-fired ceramic (LTCC) technology. A multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimetre scales was fabricated. The structure with the dimensions of 35 mm × 22 mm × 2.4 mm includes a buried cavity with a diameter of 17.3 mm and a volume of 0.3 mL. The top and bottom faces of the cavity consist of silver/palladium electrodes protected with 100 µm thick layers of LTCC. The power, used to heat a polar liquid (water) in the cavity with the volume of 0.3 mL, ranges from 5 to 40 W. This novel application of RF dielectric heating could enable the miniaturization of microfluidic systems in many applications. The working principle of such a device and its efficiency are demonstrated using water as the heated medium.

• Jezik: Angleški jezik
• Ključne besede: ceramic microsystem, microfluidics, LTCC, RF dielectric heating
• Vrsta gradiva: Članek v reviji
• Tipologija: 1.01 - Izvirni znanstveni članek
• Organizacija: FE - Fakulteta za elektrotehniko
• Status publikacije: Objavljeno
• Različica publikacije: Objavljena publikacija
• Leto izida: 2021
• Št. strani: 8 str.
• Številčenje: Vol. 14, iss. 23, art. 7396
• PID: 20.500.12556/RUL-136695
• UDK: 666
• ISSN pri članku: 1996-1944
• DOI: 10.3390/ma14237396
• COBISS.SI-ID: 87578371
• Datum objave v RUL: 16.05.2022

Gradivo je del revije

• Naslov: Materials
• Skrajšan naslov: Materials
• Založnik: MDPI
• ISSN: 1996-1944
• COBISS.SI-ID: 33588485

Licence

• Licenca: CC BY 4.0, Creative Commons Priznanje avtorstva 4.0 Mednarodna
• Povezava: http://creativecommons.org/licenses/by/4.0/deed.sl
• Opis: To je standardna licenca Creative Commons, ki daje uporabnikom največ možnosti za nadaljnjo uporabo dela, pri čemer morajo navesti avtorja.
• Začetek licenciranja: 02.12.2021