A 3D LTCC-based ceramic microfluidic system with RF dielectric heating of liquids

Makarovič, Kostja (author), Belavič, Darko (author), Vidmar, Matjaž (author), Malič, Barbara (author)

The design, fabrication and functional evaluation of the radio-frequency dielectric heating of liquids in an LTCC-based ceramic microfluidic system are described and discussed. The device, which relies on the dielectric heating of liquids, was fabricated using a low temperature co-fired ceramic (LTCC) technology. A multilayered ceramic structure with integrated electrodes, buried channels and cavities in micro and millimetre scales was fabricated. The structure with the dimensions of 35 mm × 22 mm × 2.4 mm includes a buried cavity with a diameter of 17.3 mm and a volume of 0.3 mL. The top and bottom faces of the cavity consist of silver/palladium electrodes protected with 100 µm thick layers of LTCC. The power, used to heat a polar liquid (water) in the cavity with the volume of 0.3 mL, ranges from 5 to 40 W. This novel application of RF dielectric heating could enable the miniaturization of microfluidic systems in many applications. The working principle of such a device and its efficiency are demonstrated using water as the heated medium.

• Language: English
• Keywords: ceramic microsystem, microfluidics, LTCC, RF dielectric heating
• Work type: Article
• Typology: 1.01 - Original Scientific Article
• Organization: FE - Faculty of Electrical Engineering
• Publication status: Published
• Publication version: Version of Record
• Year: 2021
• Number of pages: 8 str.
• Numbering: Vol. 14, iss. 23, art. 7396
• PID: 20.500.12556/RUL-136695
• UDC: 666
• ISSN on article: 1996-1944
• DOI: 10.3390/ma14237396
• COBISS.SI-ID: 87578371
• Publication date in RUL: 16.05.2022

Record is a part of a journal

• Title: Materials
• Shortened title: Materials
• Publisher: MDPI
• ISSN: 1996-1944
• COBISS.SI-ID: 33588485

Licences

• License: CC BY 4.0, Creative Commons Attribution 4.0 International
• Link: http://creativecommons.org/licenses/by/4.0/
• Description: This is the standard Creative Commons license that gives others maximum freedom to do what they want with the work as long as they credit the author.
• Licensing start date: 02.12.2021