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Ultra-fast laser-based surface engineering of conductive thin films
ID Mur, Jaka (Avtor), ID Petelin, Jaka (Avtor), ID Schille, Jörg (Avtor), ID Loeschner, Udo (Avtor), ID Petkovšek, Rok (Avtor)

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Izvleček
Modern electronics facilitate the need for fast, efficient, and reliable methods for direct laser-based surface engineering of conductive thin film materials on flexible substrates. Recent advances in pulsed laser source development only incrementally increased the processing speeds, as those are limited by the available scanning systems. Our goal was to combine a high pulse repetition frequency high-power pulse-on-demand fiber laser source with an ultra-fast resonant scanner to achieve high throughput surface engineering. The enabling factor to compensate a resonant scanner’s sinusoidal movement were the laser’s intrinsic pulse-on-demand capabilities beyond simple pulse picking solutions. The high temporal resolution at full laser power was exploited for spatially controlled surface texturing, allowing a minimally 3 μm positioning accuracy throughout the scanner’s range at up to 60 m/s scan speed with a 10 μm laser spot size. We applied the setup to processing of ITO and metallic films on flexible substrates for touchscreens, position sensors, or EM shielding. Surface modification and patterning of the conductive layer was successfully demonstrated while keeping the underlying surface intact. We employed a simple laser ablation model in comparison to the experimental data to improve the understanding of the ablation process. The resulting surface topography was observed and analysed.

Jezik:Angleški jezik
Ključne besede:ultra-fast laser processing, surface engineering, intrinsic pulse-on-demand, resonant scanning
Vrsta gradiva:Članek v reviji
Tipologija:1.01 - Izvirni znanstveni članek
Organizacija:FS - Fakulteta za strojništvo
Status publikacije:Objavljeno
Različica publikacije:Objavljena publikacija
Leto izida:2020
Št. strani:7 str.
Številčenje:Vol. 509, art. 144911
PID:20.500.12556/RUL-128308 Povezava se odpre v novem oknu
UDK:621.7.015:621.375.826(045)
ISSN pri članku:0169-4332
DOI:10.1016/j.apsusc.2019.144911 Povezava se odpre v novem oknu
COBISS.SI-ID:17002523 Povezava se odpre v novem oknu
Datum objave v RUL:08.07.2021
Število ogledov:742
Število prenosov:185
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Gradivo je del revije

Naslov:Applied surface science
Skrajšan naslov:Appl. surf. sci.
Založnik:Elsevier
ISSN:0169-4332
COBISS.SI-ID:3283215 Povezava se odpre v novem oknu

Licence

Licenca:CC BY-NC-ND 4.0, Creative Commons Priznanje avtorstva-Nekomercialno-Brez predelav 4.0 Mednarodna
Povezava:http://creativecommons.org/licenses/by-nc-nd/4.0/deed.sl
Opis:Najbolj omejujoča licenca Creative Commons. Uporabniki lahko prenesejo in delijo delo v nekomercialne namene in ga ne smejo uporabiti za nobene druge namene.

Sekundarni jezik

Jezik:Slovenski jezik
Ključne besede:laserska obdelava, ultrakratki pulzi, površinski pojavi, pulz na zahtevo, resonančno skeniranje

Projekti

Financer:Drugi - Drug financer ali več financerjev
Program financ.:Republic of Slovenia, Ministry of Education, Science and Sport
Akronim:GOSTOP

Financer:EC - European Commission
Program financ.:European Regional Development Fund
Akronim:GOSTOP

Financer:ARRS - Agencija za raziskovalno dejavnost Republike Slovenije
Številka projekta:L2-8183
Naslov:Visoko prilagodljivi vlakenski laserji velikih moči za uporabo v industriji

Financer:ARRS - Agencija za raziskovalno dejavnost Republike Slovenije
Številka projekta:L2-6780
Naslov:Hibridni ps-laser velikih moči

Financer:ARRS - Agencija za raziskovalno dejavnost Republike Slovenije
Številka projekta:P2-0270
Naslov:Proizvodni sistemi, laserske tehnologije in spajanje materialov

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