20.500.12556/RUL-128308 Ultra-fast laser-based surface engineering of conductive thin films Modern electronics facilitate the need for fast, efficient, and reliable methods for direct laser-based surface engineering of conductive thin film materials on flexible substrates. Recent advances in pulsed laser source development only incrementally increased the processing speeds, as those are limited by the available scanning systems. Our goal was to combine a high pulse repetition frequency high-power pulse-on-demand fiber laser source with an ultra-fast resonant scanner to achieve high throughput surface engineering. The enabling factor to compensate a resonant scanner’s sinusoidal movement were the laser’s intrinsic pulse-on-demand capabilities beyond simple pulse picking solutions. The high temporal resolution at full laser power was exploited for spatially controlled surface texturing, allowing a minimally 3 μm positioning accuracy throughout the scanner’s range at up to 60 m/s scan speed with a 10 μm laser spot size. We applied the setup to processing of ITO and metallic films on flexible substrates for touchscreens, position sensors, or EM shielding. Surface modification and patterning of the conductive layer was successfully demonstrated while keeping the underlying surface intact. We employed a simple laser ablation model in comparison to the experimental data to improve the understanding of the ablation process. The resulting surface topography was observed and analysed. ultra-fast laser processing surface engineering intrinsic pulse-on-demand resonant scanning laserska obdelava ultrakratki pulzi površinski pojavi pulz na zahtevo resonančno skeniranje true false true Angleški jezik Slovenski jezik Članek v reviji 2021-07-08 09:04:05 2021-07-08 09:04:08 2022-09-07 04:14:20 0000-00-00 00:00:00 2020 0 0 7 str. Vol. 509, art. 144911 Apr. 2020 0000-00-00 Zaloznikova Objavljeno NiDoloceno 0000-00-00 0000-00-00 0000-00-00 621.7.015:621.375.826(045) 0169-4332 10.1016/j.apsusc.2019.144911 17002523 RAZ_Mur_Jaka_2020.pdf RAZ_Mur_Jaka_2020.pdf 1 482C1E270544A77C277BD3F17CE7F5B7 f32a20d2031c138ce634f9a6636e34cf545b2464e3bf86baf3a1b8735fd116c2 a40a816a-dfbe-11eb-a523-00155dcfd717 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=145005 https://www.sciencedirect.com/science/article/pii/S0169433219337286 1 8e565548-dfba-11eb-a523-00155dcfd717 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=145000 Fakulteta za strojništvo 0 0 0