The master’s thesis covers a feasibility study on measuring torque with a piezoresistive sensor. Its attachment to the surface was studied using two sensor integrations, which also reduced measurement sensitivity. An experimental system for static torque measurements up to 7,85 N m was designed, implemented and used to compare sensitivity to mechanical deformations between the piezoresistive sensor and a metal strain gauge. Stray light and impurities on the semiconductor element surface have been identified as key external influences on the operation of the piezoresitive sensor. The creep phenomenon was examined and the temperature characteristics of the sensor was measured. The results of this thesis represent the first step in the development and characterization of a piezoresistive sensor for measuring torque.
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