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Precision and resolution in laser direct microstructuring with bursts of picosecond pulses
ID Mur, Jaka (Avtor), ID Petkovšek, Rok (Avtor)

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Izvleček
Pulsed laser sources facilitate various applications, including efficient material removal in different scientific and industrial applications. Commercially available laser systems in the field typically use a focused laser beam of 10-20 [micro] m in diameter. In line with the ongoing trends of miniaturization, we have developed a picosecond fiber laser-based system combining fast beam deflection and tight focusing for material processing and optical applications. We have predicted and verified the system's precision, resolution, and minimum achievable feature size for material processing applications. The analysis of the laser's performance requirements for the specific applications of high-precision laser processing is an important aspect for further development of the technique. We have predicted and experimentally verified that maximal edge roughness of single-micrometer-sized features was below 200 nm, including the laser's energy and positioning stability, beam deflection, the effect of spot spacing, and efficient isolation of mechanical vibrations. We have demonstrated that a novel fiber laser operating regime in bursts of pulses increases the laser energy stability. The results of our research improve the potential of fiber laser sources for material processing applications and facilitate their use through enabling the operation at lower pulse energies in bursts as opposed to single pulse regimes.

Jezik:Angleški jezik
Ključne besede:light-matter interaction, laser processing, direct laser microstructuring, burst of pulses, fiber lasers, picosecond pulses
Vrsta gradiva:Članek v reviji
Tipologija:1.01 - Izvirni znanstveni članek
Organizacija:FS - Fakulteta za strojništvo
Status publikacije:Objavljeno
Različica publikacije:Recenzirani rokopis
Poslano v recenzijo:26.09.2017
Datum sprejetja članka:16.12.2017
Datum objave:23.12.2017
Leto izida:2018
Št. strani:Str. 1-6
Številčenje:Vol. 124, iss. 1, art. 62
PID:20.500.12556/RUL-127039 Povezava se odpre v novem oknu
UDK:535:621.375.826(045)
ISSN pri članku:0947-8396
DOI:10.1007/s00339-017-1490-4 Povezava se odpre v novem oknu
COBISS.SI-ID:15822107 Povezava se odpre v novem oknu
Datum objave v RUL:14.05.2021
Število ogledov:855
Število prenosov:277
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Gradivo je del revije

Naslov:Applied physics
Skrajšan naslov:Appl. phys., A, Mater. sci. process.
Založnik:Springer
ISSN:0947-8396
COBISS.SI-ID:14196007 Povezava se odpre v novem oknu

Sekundarni jezik

Jezik:Slovenski jezik
Ključne besede:interakcija svetloba-snov, laserska obdelava, direktno lasersko mikrostrukturiranje, paketi pulzov, vlakenski laserji, pikosekundni pulzi

Projekti

Financer:ARRS - Agencija za raziskovalno dejavnost Republike Slovenije
Številka projekta:L2-6780
Naslov:Hibridni ps laser velikih moči

Financer:ARRS - Agencija za raziskovalno dejavnost Republike Slovenije
Številka projekta:L2-8183
Naslov:VISOKO PRILAGODLJIVI VLAKENSKI LASERJI VELIKIH MOČI ZA UPORABO V INDUSTRIJI

Financer:Drugi - Drug financer ali več financerjev
Program financ.:Ministry of Education, Science and Sport, Republic of Slovenia
Naslov:Gradniki, orodja in sistemi za tovarne prihodnosti
Akronim:SPS GOSTOP

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