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Dielectric barrier discharge plasma deoxidation of copper surfaces in an ▫$Ar/SiH_2$▫ atmosphere
ID
Udachin, Viktor
(
Author
),
ID
Wegewitz, L.
(
Author
),
ID
Dahle, Sebastian
(
Author
),
ID
Maus-Friedrichs, Wolfgang
(
Author
)
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MD5: B88BE48FCB6AAC560BFF660384D4974E
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Language:
English
Keywords:
dielectric barrier discharge
,
copper deoxidation
,
argon-silane plasma
,
x-ray photoelectron spectroscopy
Work type:
Article
Typology:
1.01 - Original Scientific Article
Organization:
BF - Biotechnical Faculty
Publication status:
Published
Publication version:
Version of Record
Year:
2022
Number of pages:
Str. 1169-1186
Numbering:
Vol. 42, iss. 5
PID:
20.500.12556/RUL-142072
UDC:
544
ISSN on article:
0272-4324
DOI:
10.1007/s11090-022-10268-w
COBISS.SI-ID:
113111043
Publication date in RUL:
19.10.2022
Views:
750
Downloads:
65
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Record is a part of a journal
Title:
Plasma chemistry and plasma processing
Shortened title:
Plasma chem. plasma process.
Publisher:
Plenum Press
ISSN:
0272-4324
COBISS.SI-ID:
3593999
Secondary language
Language:
Slovenian
Keywords:
dielektrična barierna razelektritev
,
rentgenska fotoelektronska spektroskopija
,
deoksidacija bakra
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