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Dielectric barrier discharge plasma deoxidation of copper surfaces in an ▫$Ar/SiH_2$▫ atmosphere
ID Udachin, Viktor (Author), ID Wegewitz, L. (Author), ID Dahle, Sebastian (Author), ID Maus-Friedrichs, Wolfgang (Author)

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Language:English
Keywords:dielectric barrier discharge, copper deoxidation, argon-silane plasma, x-ray photoelectron spectroscopy
Work type:Article
Typology:1.01 - Original Scientific Article
Organization:BF - Biotechnical Faculty
Publication status:Published
Publication version:Version of Record
Year:2022
Number of pages:Str. 1169-1186
Numbering:Vol. 42, iss. 5
PID:20.500.12556/RUL-142072 This link opens in a new window
UDC:544
ISSN on article:0272-4324
DOI:10.1007/s11090-022-10268-w This link opens in a new window
COBISS.SI-ID:113111043 This link opens in a new window
Publication date in RUL:19.10.2022
Views:750
Downloads:65
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Record is a part of a journal

Title:Plasma chemistry and plasma processing
Shortened title:Plasma chem. plasma process.
Publisher:Plenum Press
ISSN:0272-4324
COBISS.SI-ID:3593999 This link opens in a new window

Secondary language

Language:Slovenian
Keywords:dielektrična barierna razelektritev, rentgenska fotoelektronska spektroskopija, deoksidacija bakra

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