Dielectric barrier discharge plasma deoxidation of copper surfaces in an ▫$Ar/SiH_2$▫ atmosphere

Udachin, Viktor (author), Wegewitz, L. (author), Dahle, Sebastian (author), Maus-Friedrichs, Wolfgang (author)

• Language: English
• Keywords: dielectric barrier discharge, copper deoxidation, argon-silane plasma, x-ray photoelectron spectroscopy
• Work type: Article
• Typology: 1.01 - Original Scientific Article
• Organization: BF - Biotechnical Faculty
• Publication status: Published
• Publication version: Version of Record
• Year: 2022
• Number of pages: Str. 1169-1186
• Numbering: Vol. 42, iss. 5
• PID: 20.500.12556/RUL-142072
• UDC: 544
• ISSN on article: 0272-4324
• DOI: 10.1007/s11090-022-10268-w
• COBISS.SI-ID: 113111043
• Publication date in RUL: 19.10.2022

Record is a part of a journal

• Title: Plasma chemistry and plasma processing
• Shortened title: Plasma chem. plasma process.
• Publisher: Plenum Press
• ISSN: 0272-4324
• COBISS.SI-ID: 3593999

Secondary language

• Language: Slovenian
• Keywords: dielektrična barierna razelektritev, rentgenska fotoelektronska spektroskopija, deoksidacija bakra