In this Master’s thesis is in more detail described OSTE polymer material, that was developed specially for microfluidic applications and provides specific advantages like tunable mechanical and surface properties and good bonding abilities; as well as LDI laser direct imaging device for maskless lithography, that offers freedom in designing unique microfluidic circuits and allows changing and adapting the design to specific needs during research. Combination of both is used to test the behavior of OSTE polymers in the role of photoresist for direct laser photolithography of thin layers (< 50 µm). Optimal parameters of sample preparation, illumination and development process are determined. The quality of resulting structures and capabilities of the material’s current version are examined, as well as bonding abilities of smaller areas (several square micrometers) to glass, silicon and OSTE itself. Furthermore, multilayer structures are presented, which enable variation of microfluidic channels in third dimension -- height. Same structures are then used to check materials suitability for casting and molding. A simple microfluidic device with »3D« microchannels is fabricated from PDMS, using structures made with OSTE material as a mold, and flow though complex parts of microfluidic channels is observed.
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