Analiza oksidacijske obstojnosti trdih prevlek na osnovi (Ti,Al)N

Pirnat, Benjamin (author), Golobič, Amalija (mentor)

V delu smo preučevali vpliv načina montaže med nanosom trdih prevlek (Ti,Al)N na njihovo oksidacijsko obstojnost in hrapavost. Prevleke smo nanesli na keramične ploščice Al$_2$O$_3$ z naparevanjem s katodnim lokom - z montažo, ki ji ustreza enojna, dvojna in trojna rotacija okoli osi naprševalne komore. Oksidacijo smo izvajali pri štirih izotermah od 600 do 900 °C in jo spremljali z meritvami mase izven peči ter s termogravimetrično analizo. Rezultati so pokazali, da prevleke (Ti,Al)N oksidirajo parabolično do temperature 800 °C, pri 900 °C pa linearno. Najvišjo aktivacijsko energijo smo zaznali pri prevlekah trojne rotacije, kar kaže na boljšo oksidacijsko odpornost. XRD-analiza je potrdila obstojnost prevleke pri 600 °C in 700 °C, začetek razgradnje pri 800 °C ter popolno razgradnjo pri 900 °C. Ta analiza je potrdila tudi, da je količina nanešene prevleke (ob enakem času nanašanja) največja pri enojni rotaciji in najmanjša pri trojni rotaciji. Hrapavost prevlek je bila najvišja pri enojni in najnižja pri trojni rotaciji. S trojno rotacijo nastane torej tanjša, vendar bolj gladka in obstojna prevleka z bolj enakomerno površino. Raziskava potrjuje, da način vpenjanja med nanosom pomembno vpliva na kakovost zaščitnih prevlek (Ti,Al)N.

• Language: Slovenian
• Keywords: (Ti, Al)N, oksidacija, hrapavost, rentgenska difrakcija
• Work type: Bachelor thesis/paper
• Typology: 2.11 - Undergraduate Thesis
• Organization: FKKT - Faculty of Chemistry and Chemical Technology
• Year: 2025
• PID: 20.500.12556/RUL-172652
• COBISS.SI-ID: 256343299
• Publication date in RUL: 10.09.2025

Secondary language

• Language: English
• Title: Analysis of the oxidation stability of hard coatings based on (Ti,Al)N

Abstract

In this work we analysed the influence of the rotation mode during the deposition of (Ti,Al)N hard coatings on their oxidation resistance and surface roughness. The coatings were deposited on ceramic Al$_2$O$_3$ plates by cathodic arc evaporation, with one-fold, two-fold and three-fold rotation, relative to the vacuum chamber. Annealing was done at four isotherms from 600 °C to 900 °C. The annealing process was monitored by manual mass measurements outside the tube furnace and by thermogravimetric analysis. The results showed that (Ti,Al)N coatings oxidise parabolically up to 800 °C and linearly at 900 °C. The highest oxidation resistance was determined for the coating deposited by three-fold rotation. XRD analysis confirmed the stability of the coating at 600 °C and 700 °C, the start of degredation at 800 °C and it’s complete degredation at 900 °C. The analysis confirmed, that in the same time of deposition, the amount of deposited coating material is the highest with one-fold rotation and the lowest with three-fold rotation. The surface roughness was the highest in coatings deposited with one-fold rotation and the lowest in coatings with three-fold rotation. Therefore three-fold rotation in the vacuum chamber leads to a dense, smooth and stable coating with an even surface. This work confirms that the modes of rotation influence the quality of (Ti,Al)N hard coatings.

• Keywords: (Ti, Al)N, oxidation, roughness, X-ray diffraction