In the master's thesis we addressed the laser processing of stainless steel and glass samples. We used a laser with ultrashort pulses with a wavelength of 343 nm, pulse repetition rate of 333 kHz, intra-burst repetition rate of 40 MHz and pulse duration of 300 fs. With the stainless steel samples with thickness of 25 μm and 50 μm we focused on the effects of the processing parameters on the laser ablation efficiency; meanwhile with the glass samples we focused on the effects of the processing parameters on the shape and size of the hole as well as on the effects on the illumination of the processed surface where we also used an optical microscope, a scanning electron microscope (SEM) and an optical profilometer. We designed the experimental system with ultrashort laser pulses, whereas in the system we also included elements which we modeled and later printed with a 3D printer. Based on the results of the research of stainless steel samples we have concluded that the laser ablation efficiency is higher at thinner material, larger beam spot size in the focal point and lower number of pulses in a burst. We have shown the increase of the hole size on the glass samples at higher average laser power and higher number of pulses. We found out that a glass sample which we processed at a higher average laser power and higher number of pulses also has better cross illumination and a higher chance of developing needle-shaped structures at the entrance of the hole.
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