Novel THz sensor introduction, manufacturing description and examples of use

Trontelj, Janez (author), Švigelj, Andrej (author), Trontelj, Janez (author)

For the automation of industrial production, the variety of sensors plays a key role. The sensors in question are position sensors, touch sensors, temperature sensors, photo sensors, chemical sensors, etc. Recently, THz sensors joined the sensor family due to their specific property. The most common application of THz sensors is in security, as they have the ability to penetrate the clothes without harming the person. Low-power THz radiation does not damage the cells in the body and does not ionize as X-rays do. Consequently, THz rays can replace X-rays in many applications. This is happening rapidly due to the fast development of the THz wave sources and detectors. This article describes an antenna-coupled nano-bolometer for a THz sensor operating at room temperature. It was developed and manufactured in our laboratory. The key features we focused on are high sensitivity, compact size, and affordable production cost. Some practical examples of the novel THz sensor use are also presented.

• Language: English
• Keywords: THz rays, THz sensors, THz image, security check, dipol type antenna, standard microelectronic process, nano-bolometer array
• Work type: Article
• Typology: 1.01 - Original Scientific Article
• Organization: FE - Faculty of Electrical Engineering
• Publication version: Version of Record
• Year: 2024
• Number of pages: 8 str.
• Numbering: Vol. 265, iss. 2
• PID: 20.500.12556/RUL-158770
• UDC: 621.3
• ISSN on article: 1726-5479
• COBISS.SI-ID: 197741059
• Publication date in RUL: 20.06.2024

Record is a part of a journal

• Title: Sensors & transducers
• Shortened title: Sens. transducers
• Publisher: International Frequency Sensor Association.
• ISSN: 1726-5479
• COBISS.SI-ID: 515639065

Licences

• License: CC BY 4.0, Creative Commons Attribution 4.0 International
• Link: http://creativecommons.org/licenses/by/4.0/
• Description: This is the standard Creative Commons license that gives others maximum freedom to do what they want with the work as long as they credit the author.

Secondary language

• Language: Slovenian
• Keywords: THz žarki, Thz senzorji, THz slika, varnostni pregled, dvopolna antena, standardni mikroelektronski procesi, polje nano-bolometrov

Projects

• Funder: ARIS - Slovenian Research and Innovation Agency
• Project number: P2-0415
• Name: Fotovoltaika in elektronika