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Quantitative aspects of ToF-SIMS analysis of metals and alloys in a UHV, O$_2$ and H$_2$ atmosphere
ID
Ekar, Jernej
(
Author
),
ID
Kos, Saša
(
Author
),
ID
Kovač, Janez
(
Author
)
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https://www.sciencedirect.com/science/article/pii/S2468023024005650
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Abstract
Although secondary ion mass spectrometry (SIMS) is a versatile method used in the fields of surface analysis, depth profiling and elemental and molecular mapping, it also lacks quantification capabilities. The main reason for this is the matrix effect, which influences the ionization yield of secondary ions with respect to the substrate from which the analyzed compounds originate. There are several approaches to reduce the matrix effect, and gas flooding is one of the easiest methods to apply. In this work, we have investigated the possibilities of the ToF-SIMS method for the quantification of selected metals and alloys containing these metals in different ratios by reducing the matrix effect in the presence of different atmospheres. The measurements were performed in the ultra-high vacuum (UHV) environment, H$_2$ and O$_2$ atmospheres. H$_2$ flooding shows the most significant improvements compared to the UHV analysis, while O$_2$ is also promising but has some limitations. Improvements are most evident for the transition metals Ti, Cr, Fe, Co and Ni employed in our study, while the p-block elements such as Al and Si do not change so extensively. The deviations from the true atomic ratios of selected transition metals in different alloys reach a maximum of only 46 % when analyzed in the H$_2$ atmosphere. In contrast, these values are 66 and 228 % for the O$_2$ atmosphere and UHV environment, respectively. Our results suggest that gas adsorption and consequent formation of a new matrix on the surface, especially in the case of hydrogen, reduces the differences between the different chemical environments and electronic structures of the surface. In this way, the quantitative aspects of the SIMS method can be improved.
Language:
English
Keywords:
ToF-SIMS quantification
,
H$_2$ and O$_2$ gas flooding
,
matrix effect reduction
,
cluster secondary ions
Work type:
Article
Typology:
1.01 - Original Scientific Article
Organization:
FGG - Faculty of Civil and Geodetic Engineering
Publication status:
Published
Publication version:
Version of Record
Year:
2024
Number of pages:
11 str.
Numbering:
Vol. 49, art. 104408
PID:
20.500.12556/RUL-156332
UDC:
55
ISSN on article:
2468-0230
DOI:
10.1016/j.surfin.2024.104408
COBISS.SI-ID:
194756611
Publication date in RUL:
20.05.2024
Views:
243
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52
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Record is a part of a journal
Title:
Surfaces and interfaces
Publisher:
Elsevier
ISSN:
2468-0230
COBISS.SI-ID:
526516249
Licences
License:
CC BY 4.0, Creative Commons Attribution 4.0 International
Link:
http://creativecommons.org/licenses/by/4.0/
Description:
This is the standard Creative Commons license that gives others maximum freedom to do what they want with the work as long as they credit the author.
Secondary language
Language:
Slovenian
Keywords:
ToF-SIMS kvantifikacija
,
kovine
,
matrični efekt
,
preplavljanje
,
atmosferski plini
Projects
Funder:
ARIS - Slovenian Research and Innovation Agency
Project number:
P2-0082
Name:
Tankoplastne strukture in plazemsko inženirstvo površin
Funder:
ARIS - Slovenian Research and Innovation Agency
Project number:
P1-0025
Name:
Mineralne surovine
Funder:
ARIS - Slovenian Research and Innovation Agency
Project number:
PR-09757
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