Ultra-fast laser-based surface engineering of conductive thin films
ID Mur, Jaka (Author), ID Petelin, Jaka (Author), ID Schille, Jörg (Author), ID Loeschner, Udo (Author), ID Petkovšek, Rok (Author)

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Modern electronics facilitate the need for fast, efficient, and reliable methods for direct laser-based surface engineering of conductive thin film materials on flexible substrates. Recent advances in pulsed laser source development only incrementally increased the processing speeds, as those are limited by the available scanning systems. Our goal was to combine a high pulse repetition frequency high-power pulse-on-demand fiber laser source with an ultra-fast resonant scanner to achieve high throughput surface engineering. The enabling factor to compensate a resonant scanner’s sinusoidal movement were the laser’s intrinsic pulse-on-demand capabilities beyond simple pulse picking solutions. The high temporal resolution at full laser power was exploited for spatially controlled surface texturing, allowing a minimally 3 μm positioning accuracy throughout the scanner’s range at up to 60 m/s scan speed with a 10 μm laser spot size. We applied the setup to processing of ITO and metallic films on flexible substrates for touchscreens, position sensors, or EM shielding. Surface modification and patterning of the conductive layer was successfully demonstrated while keeping the underlying surface intact. We employed a simple laser ablation model in comparison to the experimental data to improve the understanding of the ablation process. The resulting surface topography was observed and analysed.

Keywords:ultra-fast laser processing, surface engineering, intrinsic pulse-on-demand, resonant scanning
Work type:Article
Typology:1.01 - Original Scientific Article
Organization:FS - Faculty of Mechanical Engineering
Publication status:Published
Publication version:Version of Record
Number of pages:7 str.
Numbering:Vol. 509, art. 144911
PID:20.500.12556/RUL-128308 This link opens in a new window
ISSN on article:0169-4332
DOI:10.1016/j.apsusc.2019.144911 This link opens in a new window
COBISS.SI-ID:17002523 This link opens in a new window
Publication date in RUL:08.07.2021
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Record is a part of a journal

Title:Applied surface science
Shortened title:Appl. surf. sci.
COBISS.SI-ID:3283215 This link opens in a new window


License:CC BY-NC-ND 4.0, Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International
Description:The most restrictive Creative Commons license. This only allows people to download and share the work for no commercial gain and for no other purposes.

Secondary language

Keywords:laserska obdelava, ultrakratki pulzi, površinski pojavi, pulz na zahtevo, resonančno skeniranje


Funder:Other - Other funder or multiple funders
Funding programme:Republic of Slovenia, Ministry of Education, Science and Sport

Funder:EC - European Commission
Funding programme:European Regional Development Fund

Funder:ARRS - Slovenian Research Agency
Project number:L2-8183
Name:Visoko prilagodljivi vlakenski laserji velikih moči za uporabo v industriji

Funder:ARRS - Slovenian Research Agency
Project number:L2-6780
Name:Hibridni ps-laser velikih moči

Funder:ARRS - Slovenian Research Agency
Project number:P2-0270
Name:Proizvodni sistemi, laserske tehnologije in spajanje materialov

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