The diploma thesis presents micro pump measurements. These are used for the flow of various liquids and are found in places where accurate and low flow rates are required. This is for example in laboratories. The advantage of this is the smaller size, low power consumption, low cost, speed of analysis, etc. There are many types of pumps in the diploma itself, but we measured 2 and 3 level micro-pumps. The difference is that 3 levels have different slots and 2 levels have the same slots.
The aim of the diploma paper was first to measure the basic data at a voltage of 100 V. Then to measure the flow and pressure when changing the frequency. With this, we have seen how each structure changes and the differences in it. In the laboratory itself, they did not have data on specific pumps for a 120 V amplitude voltage, so we checked what was going on with the device in this case. In the end, however, we had to measure how the slope of the characteristic changes with the resistance of the resistors. At the same time, we observed what happens if a bubble of air enters the channel.
In the end, we found that depending on the structure itself, what characteristics each pump has. When measuring the air, we noticed that 2 level micropumps have a higher flow rate than 3 level pumps. In both cases, the graphical progress is steadily increasing.
Measurements with water showed that the flow reaches 90% of its value up to 100 Hz. The chart itself rises steeply to this frequency and then slightly stabilizes or rises slightly. Higher flow rates are achieved by using 2 level micro-pumps. In the case of higher amplitude voltage, the values were higher.