In the last few decades, researchers from the field of low-pressure plasma technology have successfully developed solutions for many problems in industry, agriculture and biomedicine. For a given plasma, there exists a large number of possible particle interactions, so it is hard to accurately predict how a specific reactor configuration will behave. Computer simulation can be used to easily approximate different parameters in a hypothetical plasma reactor. A model of an inductively coupled reactor was constructed in COMSOL Multiphysics and used to calculate certain plasma parameters using FEM. The results were compared with Langmuir probe measurements of argon plasma in the physical reactor.
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