A strip-type microthrottle pump : modeling, design and fabrication

Pečar, Borut (author), Vrtačnik, Danilo (author), Resnik, Drago (author), Možek, Matej (author), Aljančič, Uroš (author), Dolžan, Tine (author), Amon, Slavko (author), Križaj, Dejan (author)

A novel design for a strip-type microthrottle pump with a rectangular actuator geometry is proposed, with more efficient chip surface consumption compared to existing micropumps with circular actuators. Due to the complex structure and operation of the proposed device, determination of detailed structural parameters is essential. Therefore, we developed an advanced, fully coupled 3D electro-fluid-solid mechanics simulation model in COMSOL that includes fluid inertial effects and a hyperelastic model for PDMS and no-slip boundary condition in fluid-wall interface. Numerical simulation resulted in accurate virtual prototyping of the proposed device only after inclusion of all mentioned effects. Here, we provide analysis of device operation at various frequencies which describes the basic pumping effects, role of excitation amplitude and backpressure and provides optimization of critical design parameters such as optimal position and height of the microthrottles. Micropump prototypes were then fabricated and characterized. Measured characteristics proved expected micropump operation, achieving maximal flow-rate 0.43 mL min$^{−1}$ and maximal backpressure 12.4 kPa at 300 V excitation. Good agreement between simulation and measurements on fabricated devices confirmed the correctness of the developed simulation model.

• Language: English
• Keywords: microthrottle pump, micropump, numerical simulation, 3D fully coupled model, hyperelastic model, PDMS, lab on chip, COMSOL, fluidics, optimization
• Work type: Article
• Typology: 1.01 - Original Scientific Article
• Organization: FE - Faculty of Electrical Engineering
• Publication status: Published
• Publication version: Version of Record
• Year: 2013
• Number of pages: Str. 3092-3108
• Numbering: Vol. 13, iss. 3
• PID: 20.500.12556/RUL-129499
• UDC: 681.5:621.38
• ISSN on article: 1424-8220
• DOI: 10.3390/s130303092
• COBISS.SI-ID: 9729620
• Publication date in RUL: 02.09.2021

Record is a part of a journal

• Title: Sensors
• Shortened title: Sensors
• Publisher: MDPI
• ISSN: 1424-8220
• COBISS.SI-ID: 10176278

Licences

• License: CC BY 3.0, Creative Commons Attribution 3.0 Unported
• Link: https://creativecommons.org/licenses/by/3.0/deed.en
• Description: You are free to reproduce and redistribute the material in any medium or format. You are free to remix, transform, and build upon the material for any purpose, even commercially. You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use. You may not apply legal terms or technological measures that legally restrict others from doing anything the license permits.
• Licensing start date: 04.03.2013

Secondary language

• Language: Slovenian
• Keywords: mikročrpalke, numerična simulacija, 3D popolno sklopljen model, PDMS, laboratorij na čipu, COMSOL, mikrofluidika, optimizacija

Projects

• Funder: ARRS - Slovenian Research Agency

• Funder: Other - Other funder or multiple funders
• Funding programme: Ministry of Education, Science, Culture and Sport