Postavitev in optimizacija CVD sistema za rast grafena na substratih iz bakra in niklja

Pavko, Luka (author), Genorio, Boštjan (mentor)

Grafen je eden izmed najnovejših ogljikovih nanomaterialov, ki je pritegnil veliko pozornosti, zaradi svojih lastnosti in ogromnega potenciala za različne aplikacije. Trenutno je kemijska parna depozicija ena izmed najbolj obetavnih metod za pridobivanje kakovostnih grafenskih slojev na številnih prehodnih kovinah. V ta namen je bil iz osnovnih komponent postavljen delujoč CVD sistem za rast grafena na substratih iz bakra in niklja. Predstavljeni so ključni koraki in potrebne komponente za postavitev delujočega CVD sistema. Preučeni so procesni parametri, ki vplivajo na rast grafena, ter izbira substrata, ki ima pomembno vlogo pri rasti kvalitetnega grafena. Postopek rasti je bil optimiziran do te mere, da lahko kontrolirano rastemo enoslojni grafen na substratih iz bakra in večslojni grafen na substratih iz niklja. Tako pridobljen grafen se bo uporabljal za nadaljnje študije sistemov za shranjevanje in konverzijo energije.

• Language: Slovenian
• Keywords: grafen, CVD, substrat, baker, nikelj
• Work type: Master's thesis/paper
• Typology: 2.09 - Master's Thesis
• Organization: FKKT - Faculty of Chemistry and Chemical Technology
• Year: 2019
• PID: 20.500.12556/RUL-110307
• COBISS.SI-ID: 1538431683
• Publication date in RUL: 13.09.2019

Secondary language

• Language: English
• Title: Construction and optimization of CVD system for graphene growth on copper and nickel substrates

Abstract

Graphene is one of the latest carbon nanomaterials that has attracted a lot of attention due to its properties and huge potential for various applications. Currently, chemical vapor deposition is one of the most promising methods for producing high quality graphene layers on many transition metals. A functioning CVD system for graphene growth on copper and nickel substrates was constructed from the basic components. The key steps and necessary components for setting up a functioning CVD system are presented. The process parameters that influence the graphene growth and the choice of substrate that plays an important role in the growth of quality graphene are examined. The growth process has been optimized to allow controlled growth of monolayer graphene on copper substrates and multilayer graphene growth on nickel substrates. The obtained graphene will be used for further studies of energy storage and conversion systems.

• Keywords: graphene, CVD, substrate, copper, nickel