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1. Dielectric barrier discharge plasma deoxidation of copper surfaces in an ▫$Ar/SiH_2$▫ atmosphere Viktor Udachin, L. Wegewitz, Sebastian Dahle, Wolfgang Maus-Friedrichs, 2022, izvirni znanstveni članek Ključne besede: dielectric barrier discharge, copper deoxidation, argon-silane plasma, x-ray photoelectron spectroscopy |