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Spajanje podlag silicij-steklo z anodnim bondiranjem
Resnik, Drago (Author), Možek, Matej (Author), Dolžan, Tine (Author), Amon, Slavko (Author), Vrtačnik, Danilo (Author)

URLURL - Presentation file, Visit http://www.dlib.si/details/URN:NBN:SI:doc-ENYTRUFL This link opens in a new window
Language:Slovenian
Keywords:anodno bondiranje, spoj Si-steklo, mikroobdelava, mikrostrukture za fluidiko
Work type:Not categorized (r6)
Tipology:1.01 - Original Scientific Article
Organization:FE - Faculty of Electrical Engineering
Year:2012
Publisher:Društvo za vakuumsko tehniko Slovenije
Number of pages:str. 4-11
Numbering:Letn. 32, št. 3
UDC:621.3:546.28
ISSN on article:0351-9716
COBISS.SI-ID:9435988 Link is opened in a new window
Views:630
Downloads:168
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Record is a part of a journal

Title:Vakuumist
Shortened title:Vakuumist
Publisher:Društvo za vakuumsko tehniko Slovenije
ISSN:0351-9716
COBISS.SI-ID:16059650 This link opens in a new window

Secondary language

Language:English
Keywords:anodic bonding, Si-glass bond, micromachining, microfluidic structures

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