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Influence of laser beam's image-plane position on geometry of through-holes in percussion-drilled glass using excimer laser
Babnik, Aleš (Author), Petkovšek, Rok (Author), Možina, Janez (Author)

URLURL - Presentation file, Visit http://www.mijst.mju.ac.th/vol7/48-59.pdf This link opens in a new window

Abstract
We study the influence of a laser beam's image-plane position relative to the processed surface for the deep-hole, laser-microdrilling of soda-lime glass with an excimer 308-nm laser and mask-projection technique. It is demonstrated that the image-plane position has a significant influence on the holes tapering and final depth. Holes with exit diameters up to 10 times smaller than the mask-image diameter are produced in the case of perforation during the appropriate process phase determined by the formation of the plasma plume.

Language:English
Keywords:laser processing, excimer laser, mask-projection technique, glass micro-drilling, hole geometry
Work type:Not categorized (r6)
Tipology:1.01 - Original Scientific Article
Organization:FS - Faculty of Mechanical Engineering
Year:2013
Number of pages:str. 48-59
Numbering:Vol. 7, iss. 1
UDC:535
ISSN on article:1905-7873
COBISS.SI-ID:12624667 Link is opened in a new window
Views:442
Downloads:158
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Record is a part of a journal

Title:Maejo International Journal of Science and Tecnology
Shortened title:Maejo Int. J. Sci.
Publisher:Faculty of Science, Maejo University
ISSN:1905-7873
COBISS.SI-ID:12624155 This link opens in a new window

Secondary language

Language:English
Keywords:laserska obdelava, mikro vrtanje v steklo, pulzni laserji

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