Insights into tribological performances of magnetron-sputtered Si-B-C-N films in air and seawater conditions

Luan, Jing (avtor), Ju, Hongbo (avtor)

The Si-B-C-N composite films were deposited using a RF magnetron co-sputtering system with separate SiC and B targets under the Ar+N▫$_2$▫ gas mixture, to optimize self-lubricant behaviors in both air and artificial seawater environments. Results revealed a total X-ray amorphous structure across all films, regardless of B content, characterized by the predominant chemical bonds of Si-C, Si-N, B-N and C-C (sp▫$^2$▫ and sp▫$^3$▫). Despite this amorphous nature, some twisted lattice fringes corresponding to graphitic basal planes were observed. The incorporation of B maintained the film’s hardness at approximately 20 GPa while progressively increasing the elastic modulus, likely due to bond length shortening. In air, the films with 16.1 at.% B content exhibited significantly enhanced anti-friction and wear resistance properties, which were attributed to the formation of as-deposited lubricant chemical bonds (C-C, B-N, and C-N) and stable hardness. Under artificial seawater, the coefficient of friction remained stable, ranging from 0.35 to 0.40, irrespective of B content. However, the wear rate gradually increased with higher B content, primarily due to tribocorrosion effects and the reduction in the hardness-to-elastic modulus ratio.

• Jezik: Angleški jezik
• Ključne besede: RF magnetron sputtering system, Si-B-C-N composite films, mechanicalproperties, tribological properties
• Vrsta gradiva: Članek v reviji
• Tipologija: 1.01 - Izvirni znanstveni članek
• Organizacija: FS - Fakulteta za strojništvo
• Status publikacije: Objavljeno
• Različica publikacije: Objavljena publikacija
• Leto izida: 2025
• Št. strani: Str. 14553-14564
• Številčenje: Vol. 51, issue 11
• PID: 20.500.12556/RUL-168808
• UDK: 539.92
• ISSN pri članku: 1873-3956
• DOI: 10.1016/j.ceramint.2025.01.292
• COBISS.SI-ID: 234251011
• Datum objave v RUL: 25.04.2025

Gradivo je del revije

• Naslov: Ceramics International
• Založnik: Elsevier, Techna Group
• ISSN: 1873-3956
• COBISS.SI-ID: 23209733

Licence

• Licenca: CC BY-NC-ND 4.0, Creative Commons Priznanje avtorstva-Nekomercialno-Brez predelav 4.0 Mednarodna
• Povezava: http://creativecommons.org/licenses/by-nc-nd/4.0/deed.sl
• Opis: Najbolj omejujoča licenca Creative Commons. Uporabniki lahko prenesejo in delijo delo v nekomercialne namene in ga ne smejo uporabiti za nobene druge namene.

Sekundarni jezik

• Jezik: Slovenski jezik
• Ključne besede: RF magnetronski razpršilni sistem, Si-B-C-N kompozitni filmi, mehanske lastnosti, tribološke lastnosti