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6. Mikroobdelava silicija
Drago Resnik, 1997, original scientific article

Keywords: silicij, mikroobdelava, anizotropno jedkanje, LIGA
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7. Senzorji in aktuatorji
Slavko Amon, 2013, reviewed university, higher education or higher vocational education textbook

Keywords: senzorski parametri, mikrotehnologije, mikrostrukture, piezorezistivnost, piezoelektričnost, piroelektričnost, aplikacije
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