20.500.12556/RUL-185733 Assessment of the influence of oxygen incorporation on the compositional, structural, mechanical and tribological performance of ternary MoSeC coatings The influence of intentional oxygen incorporation in recently developed ternary C-alloyed molybdenum diselenide (MoSeC) coatings has never been investigated. This study addresses this gap by systematically incorporating varying oxygen contents into MoSeC coatings, with the aim of identifying the impact on the structural, mechanical and sliding properties. MoSeC–O coatings with oxygen content in the range of 0 - 21.5 at % were deposited using reactive direct current magnetron sputtering (DCMS). The developed coatings were compact with cauliflower-like surface morphologies. The X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM) showed that the crystallinity decreased with the introduction of oxygen in the MoSeC coating. The X-ray photoelectron spectroscopy (XPS) chemical bonding investigation confirmed the presence of Mo–O bonds, indicating partial oxidation of Mo. Up to 6.9 at %, the hardness, reduced Young´s modulus, friction and wear showed only minor changes. However, beyond this level, these properties deteriorated substantially. The Raman spectroscopy of the wear tracks revealed formation of low friction MoSe▫$_{2}$▫ tribolayer as the dominant friction reduction mechanism. Whereas, higher oxygen content suppressed the formation of effective tribolayer due to excessive oxidation and loss of MoSe▫$_{2}$▫ crystallinity, in agreement with the structural and chemical bonding results. Overall, the results indicate that a moderate oxygen content can be tolerated in MoSeC coatings, which may allow for more relaxed vacuum and purity conditions during deposition, offering a more cost effective and industrial friendly synthesis route. transition metal dichalcogenide MoSe2 MoSeC coatings oxygen incorporation magnetron sputtering prehodni kovinski dikalkogenidi MoSe2 MoSeC prevleke vgradnja kisika magnetronsko naprševanje true false true Angleški jezik Slovenski jezik Članek v reviji 2026-08-19 11:15:20 2026-08-19 11:15:28 2026-08-20 04:19:40 0000-00-00 00:00:00 2026 0 0 19 str. Vol. 32, art. 112310 2026 0000-00-00 Zaloznikova Objavljeno NiDoloceno 0000-00-00 0000-00-00 0000-00-00 539.92:621.793 2590-1230 10.1016/j.rineng.2026.112310 288173571 Yagub_..._Assessment_of_the_influence....pdf Yagub_..._Assessment_of_the_influence....pdf 1 14A2356D49C0DDC6396337AF5D83C686 9e07a2090af67e5aeefaa17204af9733dc20953d6fe36cfba9e2577537bee5f4 6854c59e-9bae-11f1-9b0d-0050569b8976 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=244565 https://www.sciencedirect.com/science/article/pii/S259012302603330X 1 24a8fde4-9bae-11f1-9b0d-0050569b8976 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=244557 Fakulteta za strojništvo 0 0 0