20.500.12556/RUL-179806 Karakterizacija napršenih tankih plasti ITO za aplikacije v avtomobilski industriji magistrsko delo Characterization of sputtered thin films ITO for automotive applications master's thesis V podjetju Hella Saturnus Slovenija d.o.o. proizvajajo izdelke za avtomobilsko industrijo, ki pogosto vsebujejo uporovne grelne elemente zabrizgane v polimere. Uporovni grelci lahko delujejo tudi na osnovi (transparentnih) prevodnih tankih plasti. V industriji najpogosteje uporabljen material za transparentne prevodne tanke plasti je In2O3–SnO2, indij kositrov oksid (ang. Indium Tin Oxide – ITO). Cilj tega dela je bil ovrednotiti optične in električne lastnosti tankih plasti ITO, ki bi lahko potencialno nadomestile grelne elemente iz žic. Z naprševanjem tankih plasti ITO smo izdelali šest šarž vzorcev, od katerih so bile štiri transparentne. Pri tem smo uporabili tri različne tarče – dve kovinski in eno oksidno. Naprševali smo na podlage iz polikarbonata, stekla in silicija. Transparentnim šaržam smo izmerili debelino tanke plasti ITO po metodi profilometrije, transparentnost v vidnem spektru po metodi UV-VIS spektroskopije, plastno električno upornost s štiritočkovno metodo in radarske lastnosti z metodama RMS (ang. Radome Measuring System) ter QAR (ang. Quality Automotive Radome). Z uporabo vrstičnega elektronskega mikroskopa (SEM) smo analizirali mikrostrukturo tankih plasti ITO ter kemijsko sestavo z metodo energijske disperzijske spektroskopije (EDS). Iz rezultatov, pridobljenih z meritvami in analizami, smo ugotovili, da večja debelina tanke plasti ITO prinese manjšo transparentnost v vidnem spektru in manjšo plastno električno upornost. V odvisnosti od debeline tanke plasti se spreminja tudi kemijska sestava tanke plasti ITO. The company Hella Saturnus Slovenija d.o.o. manufactures products for the automotive industry that often incorporate resistive heating elements embedded in polymers. Resistive heaters can also be based on (transparent) conductive thin films. The most used material in industry for transparent conductive thin films is In2O3–SnO2, indium tin oxide (ITO). The aim of this work was to evaluate the optical and electrical properties of ITO thin films that could potentially replace wire-based heating elements. Using sputtering deposition, we prepared six batches of ITO thin film samples, four among them were transparent. We used three different targets – two metal and one oxide. We deposited the films onto polycarbonate, glass, and silicon substrates. For the transparent batches, the ITO film thickness was measured using profilometry, optical transmittance in the visible spectrum by UV–VIS spectroscopy, and layer resistance using the four-point probe method. Radar performance was evaluated using the RMS (Radome Measuring System) and QAR (Quality Automotive Radome) methods. The microstructure of the ITO thin films was analysed using scanning electron microscopy (SEM), while their chemical composition was determined by energy-dispersive spectroscopy (EDS). From the results obtained by measurements and analyses, we concluded that an increase in ITO film thickness leads to a reduced optical transmittance in the visible spectrum and a lower layer electrical resistance. The chemical composition of ITO thin films also changes with film thickness. ITO indij kositrov oksid naprševanje transparentne prevodne tanke plasti uporovni grelec ITO indium tin oxide sputtering transparent conductive thin films electrical resistance heater true false false J. Dolenc Slovenski jezik Angleški jezik Magistrsko delo/naloga 2026-02-25 09:00:09 2026-02-25 09:00:19 2026-03-03 10:50:42 0000-00-00 00:00:00 2026 0 Ljubljana 0 Ljubljana XVII, 51 f. 0000-00-00 NiDoloceno NiDoloceno NiDoloceno 0000-00-00 0000-00-00 0000-00-00 2027-02-20 669 113373 270238467 28609.pdf 28609.pdf 1 A43B073C5BE8B088DBA74614F1B30C10 1380e8f87292ddd252b4523057e96e81a5a2524c38e6a70025fb074c9341443a b8d5c078-121f-11f1-a1ba-0050569b8976 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=228640 Naravoslovnotehniška fakulteta 0 0 0