20.500.12556/RUL-165590 Effect of silicon and oxygen co-doping on structure and properties of non‑hydrogenated amorphous carbon Introducing silicon and oxygen dopants into amorphous carbon (a-C) is known to improve its structural and functional properties, making it suitable for specialized applications. Yet, given the limited compositional control offered by the complex deposition methods, the relationship between dopant concentration and coating properties is not well understood. This study systematically investigates the effect of increasing silicon (0 – 30 at.%) and oxygen (0 – 20 at.%) content on structure, hardness, reduced modulus, and surface wettability of non‑hydrogenated a-C coatings, deposited by magnetron sputtering. The coating composition was controlled by adjusting the power applied to the silicon target and the oxygen gas flow rate during the sputtering process. Our results indicate that with increasing silicon content, the sp3/sp2 fraction, hardness, reduced modulus, and surface energy progressively increased. Moreover, while high oxygen content, in general, promoted graphitization, leading to loss of mechanical properties, it also helped in reducing surface energy by terminating silicon bonds. Nonetheless, it was observed that the otherwise detrimental effect of oxygen doping on mechanical properties could be avoided by maintaining a low concentration of oxygen (∼ 10 at.%), combined with high silicon content (> 18 at.%). This work establishes optimized doping conditions for tailoring the structure and properties of silicon and oxygen co-doped non‑hydrogenated a-C coatings, potentially extending their usage in protective and functional applications. amorphous carbon silicon doping oxygen doping a-C:Si:O hardness surface wettability true false true Angleški jezik Ni določen Članek v reviji 2024-12-09 14:44:33 2024-12-09 14:44:37 2025-02-27 15:03:18 0000-00-00 00:00:00 2025 0 0 11 str. Vol. 496, art. 131616 2025 0000-00-00 Zaloznikova Objavljeno NiDoloceno 0000-00-00 0000-00-00 0000-00-00 621.7.015 0257-8972 10.1016/j.surfcoat.2024.131616 218270211 Naseer_..._Effect_of_silicon_and_oxygen_co-doping_on_structure_and_properties.pdf Naseer_..._Effect_of_silicon_and_oxygen_co-doping_on_structure_and_properties.pdf 1 02039D0599F8062F8532C0E90C70774A 47905c1f3f1aeb9fa2c2f0be903b03b6279ff84f471bc0ad4fbf4e2317237caa 90234b36-b633-11ef-b232-0050569b8976 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=196754 https://www.sciencedirect.com/science/article/pii/S0257897224012489 1 4136e8e7-b633-11ef-b232-0050569b8976 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=196753 Fakulteta za strojništvo 0 0 0