20.500.12556/RUL-146160 Investigation of structural and electrical properties of ▫$Al_2O_3/Al$▫ composites prepared by aerosol co-deposition As the microelectronic industry develops, components that can perform several different tasks receive increasingly more attention, resulting in multifunctional materials being highly sought after. ▫$Al_2O_3$▫ is widely present in electronic applications as a protective coating or as an electrical and thermal insulator due to its mechanical and thermal stabilities and chemical inertness. ▫$Al_2O_3$▫ is also an important dielectric material, with high resistivity and stable permittivity over a wide range of temperatures and electric fields, but its modest permittivity necessitates large effective areas or extremely thin layers when a large capacitance is desired. Composites consisting of discrete conducting phases within an insulating matrix can produce large capacitance via Maxwell–Wagner polarization. In this work, ▫$Al_2O_3$▫/Al composite thick films with different volume ratios of Al were prepared using the aerosol deposition method. A relative dielectric permittivity (εr′) of 800 at 1 MHz was achieved at 27 vol% of Al, a sixty-sevenfold enhancement compared to ▫$Al_2O_3$▫. On the other hand, dielectric losses, tan(δ), at 1 MHz increased from 0.01 for ▫$Al_2O_3$▫ up to 0.58 for the composite with 27 vol% of Al. A finite-element model of the composites was implemented, supporting the nonlinear electrical behavior of the composites as function of vol% of Al. Our results show novel possibilities for the applications of ▫$Al_2O_3$▫-based materials in the microelectronic industry, especially for temperature-sensitive applications, for which the integration strengths of aerosol deposition are valuable. alumina aluminum multifunctional materials thick films aerosol deposition alumina aluminij multifunkcijski materiali debeli filmi nanašanje z aerosolom true false true Angleški jezik Slovenski jezik Članek v reviji 2023-05-22 13:01:12 2023-05-22 13:01:21 2023-05-25 03:36:57 0000-00-00 00:00:00 2023 0 0 12 str. iss. 5, art. 850 Vol. 13 May 2023 0000-00-00 Zaloznikova Objavljeno NiDoloceno 0000-00-00 0000-00-00 0000-00-00 620.1 2073-4352 10.3390/cryst13050850 152943619 Regis...-Investigation_of_Structural_and_Electrical_Properties....pdf Regis...-Investigation_of_Structural_and_Electrical_Properties....pdf 1 B2014EF289523707B2C1E09A14838E20 e4fb03c8d93b5058a22a49302f727ec1e0cd8f65771aa67934b4177addb51bae 9ef2166c-f890-11ed-a314-00155dcfd717 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=169310 https://www.mdpi.com/2073-4352/13/5/850 1 b635db03-f88f-11ed-a314-00155dcfd717 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=169309 Fakulteta za strojništvo 0 0 0