20.500.12556/RUL-142582 Diffraction-driven laser surface nanostructuring towards patterning with curved periodic surface structures The quest for miniaturization of devices and control over surface properties motivate rigorous efforts to artificially fabricate surfaces with nanometer features. Here we present a method for fabricating curved, meandering grooves with submicrometer spacing by laser irradiation in liquid. We show that this is possible by using the cavitation bubbles formed during irradiation as diffraction objects to spatially modulate the intensity distribution of the beam, which is imprinted into the top layer of material surface. The bubbles are manipulated with thermo-optical tweezers by thermocapillary forces generated by the temperature gradient in the liquid around the irradiation spot. The presented results show that high viscosity of the liquid, producing laminar flow conditions, provides sufficient stability of the cavitation bubble dynamics for the generation of regular arc-shaped concentric microgroove channels with a depth of several hundred nanometers and a radius of curvature in the micrometer range. Their position is determined by the beam guiding pattern. The results clearly show that cavitation bubbles can be used as an aid in laser ablation in liquids and not just as an undesirable effect, as usually classified in the literature. laser ablation in liquids cavitation bubbles laser microstructuring meandering microstructures diffraction LIPSS laserska ablacija v kapljevinah kavitacijski mehurčki lasersko mikrostrukturiranje true false true Angleški jezik Slovenski jezik Članek v reviji 2022-11-14 11:55:10 2022-11-14 11:55:18 2023-01-17 03:36:37 0000-00-00 00:00:00 2023 0 0 10 str. Vol. 610, art. 155486 Feb. 2023 0000-00-00 Zaloznikova Objavljeno NiDoloceno 0000-00-00 0000-00-00 0000-00-00 532 0169-4332 10.1016/j.apsusc.2022.155486 129205507 Senegacnik,__Gregorcic_-_Diffraction-driven_laser_surface_nanostructuring.pdf Senegacnik,__Gregorcic_-_Diffraction-driven_laser_surface_nanostructuring.pdf 1 E5022CFEAE00D59E68D56F72A030BF8F e124ea6992c92f53aae3ee01a518f7c70252b2dee6214eb3616eb858f010cd9f 898206cf-6bd4-11ed-9c94-00155dcfd717 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=164242 https://www.sciencedirect.com/science/article/pii/S0169433222030148 1 b77a724a-640a-11ed-9c94-00155dcfd717 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=164009 Fakulteta za strojništvo 0 0 0