20.500.12556/RUL-130819 Sensitivity comparison of vapor trace detection of explosives based on chemo-mechanical sensing with optical detection and capacitive sensing with electronic detection The article offers a comparison of the sensitivities for vapour trace detection of Trinitrotoluene (TNT) explosives of two different sensor systems: a chemo-mechanical sensor based on chemically modified Atomic Force Microscope (AFM) cantilevers based on Micro Electro Mechanical System (MEMS) technology with optical detection (CMO), and a miniature system based on capacitive detection of chemically functionalized planar capacitors with interdigitated electrodes with a comb-like structure with electronic detection (CE). In both cases (either CMO or CE), the sensor surfaces are chemically functionalized with a layer of APhS (trimethoxyphenylsilane) molecules, which give the strongest sensor response for TNT. The construction and calibration of a vapour generator is also presented. The measurements of the sensor response to TNT are performed under equal conditions for both systems, and the results show that CE system with ultrasensitive electronics is far superior to optical detection using MEMS. Using CMO system, we can detect 300 molecules of TNT in 10$^{+12}$ molecules of N$_2$ carrier gas, whereas the CE system can detect three molecules of TNT in 10$^{+12}$ molecules of carrier N$_2$. small capacitance measurements trinitrotoluene (TNT) vapor trace detection chemical modifications gas sensors micro electro mechanical systems (MEMS) sensors vapor trace detection meritve majhnih kapacitivnosti detekcija par TNT kemijska modifikacija senzorji plinov MEMS senzorji detekcija sledi par true false true Angleški jezik Slovenski jezik Članek v reviji 2021-09-17 14:00:35 2021-09-17 14:00:35 2022-09-09 04:18:11 0000-00-00 00:00:00 2014 0 0 Str. 11467-11491 iss. 7 Vol. 14 Jul. 2014 0000-00-00 Zaloznikova Objavljeno NiDoloceno 0000-00-00 0000-00-00 0000-00-00 681.5:621.38 1424-8220 10.3390/s140711467 10678868 RAZ_Strle_Drago_2014.pdf RAZ_Strle_Drago_2014.pdf 1 973804280DA83BABDC0AE0DFBDDED245 642556847a1491b219fabf6932efc4fecd553719e43bd6ea9757b6098e0693d6 21c0c111-17af-11ec-a523-00155dcfd717 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=147991 https://www.mdpi.com/1424-8220/14/7/11467 0 cdccd194-17ae-11ec-a523-00155dcfd717 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=147990 Fakulteta za elektrotehniko Fakulteta za kemijo in kemijsko tehnologijo 0 0 0