20.500.12556/RUL-128313 Silicon crystallinity control during laser direct microstructuring with bursts of picosecond pulses Laser ablation and modification using bursts of picosecond pulses and a tightly focused laser beam are used to manufacture structures in the bulk silicon. We demonstrate precise control of the surface crystallinity as well as the structure depth and topography of the processed areas, achieving homogeneous surface properties. The control is achieved with a combination of a well-defined pulse energy, systematic pulse positioning on the material, and the number of pulses in a burst. A custom designed fiber laser source is used to generate bursts of 1, 5, 10, and 20 pulses at a pulse repetition rate of 40 MHz and burst repetition rate of 83.3 kHz allowing for a fast and stable processing of silicon. We show a controlled transition through different laser-matter interaction regimes, from no observable changes of the silicon at low pulse energies, through amorphization below the ablation threshold energy, to the ablation with either complete, partial or nonexistent amorphization. Single micrometer-sized areas of desired shape and crystallinity were defined on the silicon surface with submicron precision, offering a promising tool for applications in the field of optics. silicon crystallinity light-matter interaction laser processing direct laser microstructuring bursts of pulses picosecond pulses lasers fiber laser materials processing microstructure fabrication silicij kristaliničnost interakcija svetloba-snov laserska obdelava direktno lasersko mikrostrukturiranje paketi pulzov pikosekundni pulzi true false true Angleški jezik Slovenski jezik “© 2017 Optical Society of America. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved.” (Datum opombe: 12. 6. 2023) Članek v reviji 2021-07-08 10:20:12 2021-07-08 10:20:16 2023-06-12 13:08:04 0000-00-00 00:00:00 2017 0 0 Str. 26356-26364 no. 21, art. 306977 Vol. 25 Oct. 2017 0000-00-00 Zaloznikova Objavljeno NiDoloceno 0000-00-00 0000-00-00 0000-00-00 535:621.375.826(045) 1094-4087 10.1364/OE.25.026356 15709467 RAZ_Mur_Jaka_2017.pdf RAZ_Mur_Jaka_2017.pdf 1 AA043444E0A8A31BFF140742DDC7CDC4 2aab485b4cf88ef3a6cb06d2307adf4e72849d00379c781f46432d84392ad2de 1924bfd6-dfc6-11eb-a523-00155dcfd717 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=145011 https://opg.optica.org/oe/fulltext.cfm?uri=oe-25-21-26356&id=375271 0 45c43fef-0906-11ee-a314-00155dcfd717 https://repozitorij.uni-lj.si/Dokument.php?lang=slv&id=170045 Fakulteta za strojništvo Fakulteta za matematiko in fiziko 0 0 0