Dielectric barrier discharge plasma deoxidation of copper surfaces in an ▫$Ar/SiH_2$▫ atmosphereUdachin, Viktor (Avtor) Wegewitz, L. (Avtor) Dahle, Sebastian (Avtor) Maus-Friedrichs, Wolfgang (Avtor) dielectric barrier dischargecopper deoxidationargon-silane plasmax-ray photoelectron spectroscopy20222022-10-19 08:28:27Članek v reviji142072UDK: 544ISSN pri članku: 0272-4324DOI: 10.1007/s11090-022-10268-wCOBISS_ID: 113111043sl