<?xml version="1.0"?>
<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:dc="http://purl.org/dc/elements/1.1/"><rdf:Description rdf:about="https://repozitorij.uni-lj.si/IzpisGradiva.php?id=142072"><dc:title>Dielectric barrier discharge plasma deoxidation of copper surfaces in an ▫$Ar/SiH_2$▫ atmosphere</dc:title><dc:creator>Udachin,	Viktor	(Avtor)
	</dc:creator><dc:creator>Wegewitz,	L.	(Avtor)
	</dc:creator><dc:creator>Dahle,	Sebastian	(Avtor)
	</dc:creator><dc:creator>Maus-Friedrichs,	Wolfgang	(Avtor)
	</dc:creator><dc:subject>dielectric barrier discharge</dc:subject><dc:subject>copper deoxidation</dc:subject><dc:subject>argon-silane plasma</dc:subject><dc:subject>x-ray photoelectron spectroscopy</dc:subject><dc:date>2022</dc:date><dc:date>2022-10-19 08:28:27</dc:date><dc:type>Članek v reviji</dc:type><dc:identifier>142072</dc:identifier><dc:language>sl</dc:language></rdf:Description></rdf:RDF>